Accelerating voltage 30kV In-chamber image detection Everhart-Thorney SEI Scintillator or solid state BEI Through-lens detectors SE and BE standard In-column Faraday Cage Not available Variable chamber vacuum 1-150Pa Magnification range 10x to 2,500,000x Fully Eucentric 6-axis stage X=100mm, Y=100mm, Z=50mm, Z'=10mm, Rotate=360º, Tilt=-10º to +90º Stage motorisation X, Y and Z - standard rotate and tilt - optional Alternative 6-axis stage X=100mm, Y=150mm Chamber size 315mm high x 415mm x 315mm
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